Plasma Processing of Materials (1985)

Chapter: PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS

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Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 125 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 126 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 127 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 127
Page 128 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 129 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 130 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 130
Page 131 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 131
Page 132 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 132
Page 133 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 134 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 134
Page 135 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 135
Page 136 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 136
Page 137 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 137
Page 138 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 138
Page 139 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 139
Page 140 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 140
Page 141 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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Page 141
Page 142 Cite Bookmark
Suggested Citation: "PROCESSING OF MATERIAL USING LOW-PRESSURE, NONEQUILIBRIUM PLASMAS." National Research Council. 1985. Plasma Processing of Materials. Washington, DC: The National Academies Press. doi: 10.17226/20290.
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