| AC | alternating current |
| ACS Nano | American Chemical Society Nano |
| AFM | atomic force microscope |
| CAD | computer-aided design |
| CdTe | cadmium telluride |
| CMOS | complementary metal-oxide semiconductor |
| CNST | Center for Nanoscale Science and Technology |
| DC | direct current |
| DOC | Department of Commerce |
| DOE | Department of Energy |
| DLS | dynamic light scattering |
| EPG | Electron Physics Group |
| ERG | Energy Research Group |
| FE-SEM | field emission scanning electron microscope |
| FY | fiscal year |
| HRTEM | high-resolution transmission electron microscopy |
| IT | information technology |
| MEMS | microelectromechanical systems |
| MIT | Massachusetts Institute of Technology |
| NanoFab | Nanofabrication Facility |
| NCNR | NIST Center for Neutron Research |
| NEMO | NanoFab Equipment Management Operation |
| NEMS | nanoelectromechanical systems |
| NIH | National Institutes of Health |
| NNCI | National Nanotechnology Coordinated Infrastructure |
| NNI | network-to-network interface |
| NNIN | National Nanotechnology Infrastructure Network |
| NIST | National Institute of Standards and Technology |
| NRC | National Research Council |
| NRG | Nanofabrication Research Group |
| NV | nitrogen vacancy |
| PDMS | polydimethylsiloxane |
| PEM | polymer electrolyte membrane |
| PVD | physical vapor deposition |
| SEMPA | scanning electron microscopy with polarization analysis |
| STM | scanning tunneling microscope |
| SWOT | strengths, weaknesses, opportunities, and threats |
| TEM | transmission electron microscope |
| UGIM | University/Government/Industry Micro/Nanotechnology |
| UHV | ultrahigh vacuum |
| ULT-STM | ultralow-temperature scanning tunneling microscope |