Plasma Processing and Processing Science (1995)

Chapter: Plasma Deposition and Polymerization

Previous Chapter: Semiconductor Processing
Suggested Citation: "Plasma Deposition and Polymerization." National Research Council. 1995. Plasma Processing and Processing Science. Washington, DC: The National Academies Press. doi: 10.17226/9854.
Page 13
Suggested Citation: "Plasma Deposition and Polymerization." National Research Council. 1995. Plasma Processing and Processing Science. Washington, DC: The National Academies Press. doi: 10.17226/9854.
Page 14
Next Chapter: Ion Implantation and Surface Modification
Subscribe to Emails from the National Academies
Stay up to date on activities, publications, and events by subscribing to email updates.