Database Needs for Modeling and Simulation of Plasma Processing (1996)

Chapter: Appendix C: Workshop Participants

Previous Chapter: Appendix B: Workshop Agenda
Suggested Citation: "Appendix C: Workshop Participants." National Research Council. 1996. Database Needs for Modeling and Simulation of Plasma Processing. Washington, DC: The National Academies Press. doi: 10.17226/5434.

Appendix C:
Workshop Participants

Wahab Ali

AWA Associates

Harold M.Anderson

University of New Mexico

Kaihan A. Ashtiani

Materials Research Corporation

Eray S. Aydil

University of California at Santa Barbara

James Babb

Harvard-Smithsonian Center for Astrophysics

Andrew D. Bailey III

Plasma and Materials Technologies

James N. Bardsley

Lawrence Livemore National Laboratory

Richard J. Buss

Sandia National Laboratories

Timothy S. Cale

Arizona State University

David C. Cartwright

Los Alamos National Laboratory

Charles Cerjan

Lawrence Livemore National Laboratory

Malcolm W. Chase

National Institute of Standards and Technology

Loucas G. Christophorou

National Institute of Standards and Technology

Joel M. Cook

Lam Research Corporation

Frederick Dill

IBM T.J. Watson Research Center

Vince Donnelly

AT&T Bell Laboratories

Demetre J. Economou

University of Houston

Erik Egan

Motorola

Douglas Ernie

University of Minnesota

Sychi Fang

Intel Corporation

David Fraser

Intel Corporation

Jean W. Gallagher

National Institute of Standards and Technology

Alan Garscadden

Wright Laboratory

Abe Ghanbari

Materials Research Corporation

Konstantinos P. Giapis

California Institute of Technology

Larry Goldberg

National Science Foundation

Steven M. Gorbatkin

Oak Ridge National Laboratory

R.A. Gottscho

AT&T Bell Laboratories

David B. Graves

University of California, Berkeley

David S. Green

National Institute of Standards and Technology

Michael Hartig

Motorola/Sematech

Gerald Hays

Sandia National Laboratories

Irving P. Herman

Columbia University

Dennis Hewett

Lawrence Livemore National Laboratory

Pauline Ho

Sandia National Laboratories

Bert Hui

Defense Advanced Research Projects Agency

Ellis Hyman

Science Applications International Corporation

Mitio Inokuti

Argonne National Laboratory

Les Jerde

Tegal Corporation

Rainer Johnsen

University of Pittsburgh

Glenn Joyce

Naval Research Laboratory

Yong-Ki Kim

National Institute of Standards and Technology

Kate Kirby

Harvard-Smithsonian Center for Astrophysics

Anantha Krishnan

CFD Research Corporation

Mark J. Kushner

University of Illinois at Urbana-Champaign

Suggested Citation: "Appendix C: Workshop Participants." National Research Council. 1996. Database Needs for Modeling and Simulation of Plasma Processing. Washington, DC: The National Academies Press. doi: 10.17226/5434.

Andrew Labun

Digital Equipment Corporation

Martin Lampe

Naval Research Laboratory

Barton Lane

Plasma Dynamics

James E. Lawler

University of Wisconsin

Chun C. Lin

University of Wisconsin

Gary Mallard

National Institute of Standards and Technology

Vasilios Manousiouthakis

University of California, Los Angeles

Jim Mc Vittie

Stanford University

Ellen Meeks

Sandia National Laboratories

Fred W. Meyer

Oak Ridge National Laboratory

M. Meyyappan

Scientific Research Associates

Michael Mocella

Dupont Fluoroproducts

W. Lowell Morgan

Kinema Research and Software

Gottlieb S. Oehrlein

State University of New York at Albany

Arthur V. Phelps

JILA, University of Colorado

Joseph Proud

GTE (retired)

Thomas Rescigno

Lawrence Livemore National Laboratory

Charles Roberson

Office of Naval Research

Yosuke Sakai

Hokkaido University

Martin Schmidt

Institut fur Niedertemperatur-Plasmaphysik Greifswald

Barry I. Schneider

National Science Foundation

Vikram Singh

Lam Research Corporation

Vivek Singh

Intel Corporation

Steve Slinker

Naval Research Laboratory

Santosh K. Srivastava

Jet Propulsion Laboratory

William Stwalley

University of Connecticut

M. Surendra

IBM T.J. Watson Research Center

Wing Tsang

National Institute of Standards and Technology

Anna Tsao

Defense Advanced Research Projects Agency

Vahid Vahedi

Lawrence Livemore National Laboratory

Richard J. Van Brunt

National Institute of Standards and Technology

Alexander M. Voshchenkov

Lam Research Corporation

James R. Whetstone

National Institute of Standards and Technology

Claude Woods

University of Wisconsin

Jody Wormhoudt

Aerodyne Research

Michael Zachariah

National Institute of Standards and Technology

Suggested Citation: "Appendix C: Workshop Participants." National Research Council. 1996. Database Needs for Modeling and Simulation of Plasma Processing. Washington, DC: The National Academies Press. doi: 10.17226/5434.
Page 63
Suggested Citation: "Appendix C: Workshop Participants." National Research Council. 1996. Database Needs for Modeling and Simulation of Plasma Processing. Washington, DC: The National Academies Press. doi: 10.17226/5434.
Page 64
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