Database Needs for Modeling and Simulation of Plasma Processing (1996)
Chapter: Appendix B: Workshop Agenda
Appendix B:
Workshop Agenda
Saturday, April 1, 1995
|
0900 |
Opening Remarks |
David B. Graves and Mark J. Kushner, Co-chairs |
|
0910 |
ARPA Objectives |
Bert Hui, Defense Advanced Research Projects Agency |
Session I: Industrial Perspectives
|
A. Equipment Supplier Perspectives |
||
|
0925 |
Modeling: A Design Engine For The U.S. Semiconductor Equipment Industry |
Alexander M. Voshchenkov, Lain Research Corporation |
|
1005 |
Challenges in Design and Manufacturing of Semiconductor Process Equipment |
Abe Ghanbari, Materials Research Corporation |
|
1045 |
Break |
|
|
B. Chip Manufacturer Perspectives |
||
|
1100 |
Plasma Processes—A Chipmaker's View |
Frederick Dill, IBM T.J. Watson Research Center |
|
1140 |
Digital Semiconductor's Perspective on Plasma Modeling and Database Needs |
Andrew Labun, Digital Equipment Corporation |
|
1215 |
Lunch |
|
Session II: Status And Needs Of Modeling And Simulation
|
A. Tool Scale Simulation |
||
|
1315 |
Glow Discharge Plasma Simulation: Current Status, Needs, and Future Outlook |
Demetre J. Economou, University of Houston |
|
1345 |
Development of Design Oriented Simulation Tools for the Microelectronic Industry |
Anantha Krishnan, CFD Research Corporation |
|
B. Feature Scale Simulation |
||
|
1415 |
Low Pressure Transport and Reaction in Features |
Timothy S. Cale, Arizona State University |
|
1445 |
Feature Scale Simulation and Model Characterization |
Vivek Singh, Intel Corporation |
|
1515 |
Break |
|
Session III: Discussion
|
1530 |
Breakout Sessions Industrial Perspectives Tool Scale Feature Scale |
|
|
1630 |
Break |
|
|
1645 |
Reports on Breakout Sessions |
|
|
1645 |
Industrial Perspectives |
Andrew Labun |
|
1705 |
Tool Scale |
Demetre Economou |
|
1725 |
Feature Scale |
Vivek Singh |
|
1745 |
Summary Discussion |
David Graves and Mark Kushner |
|
1915 |
Dinner |
|
Sunday, April, 2, 1995
Session IV: Database Needs
|
0900 |
Introductory Remarks |
David B. Graves and Mark J. Kushner, Co-chairs |
|
0900 |
Database Needs: Electron Impact Processes |
Jean W. Gallagher, National Institute of Standards and Technology |
|
0930 |
Rate Constants of Heterogeneous Processes in Plasma-Assisted Processing |
Gottlieb S. Oehrlein, SUNY Albany |
|
1000 |
Status of Ion and Neutral Chemistry Databases |
Mark J. Kushner, University of Illinois at Urbana-Champaign |
|
1030 |
Break |
|
|
1045 |
Thermodynamic and Excited State Data for Plasma Processing |
Arthur V. Phelps, JILA |
|
1115 |
Data Needs for Radiative Processes and Diagnostics |
Alan Garscadden, Air Force Wright Laboratory |
|
1145 |
Critical Evaluation and Dissemination of Plasma Databases |
W. Lowell Morgan, Kinema Research and Software |
|
1215 |
Lunch |
|
Session V: Discussion
|
1315 |
Breakout Sessions Electron Impact Processes Heterogeneous Processes Ion Impact Processes and Neutral Chemistry Thermochemistry of Reactive Species Radiative Processes and Diagnostics |
|
|
1445 |
Break |
|
|
1500 |
Reports on Breakout Sessions |
|
|
1500 |
Electron Impact Processes |
Jean Gallagher |
|
1520 |
Heterogeneous Processes |
Gottlieb Oehrlein |
|
1540 |
Ion Impact Processes and Neutral Chemistry |
Mark Kushner |
|
1600 |
Thermochemistry of Reactive Species |
Arthur Phelps |
|
1620 |
Radiative Processes and Diagnostics |
Alan Garscadden |
|
1640 |
Summary Discussion |
David Graves and Mark Kushner |
|
1800 |
Adjourn |
|
